Imikorere yintego muri Vacuum Electrodeposition

Intego ifite imikorere myinshi hamwe nibisabwa mugari mubice byinshi.Ibikoresho bishya bisohora hafi ya byose bikoresha magnesi zikomeye kugirango zizunguruke electron kugirango yihutishe ionisation ya argon ikikije intego, ibyo bikaba byongera amahirwe yo kugongana hagati yintego na ion ya argon,

Ongera igipimo cyo gusohoka.Mubisanzwe, DC gusohora bikoreshwa mugutwikira ibyuma, mugihe itumanaho rya RF rikoreshwa mubikoresho bya magnetiki bidafite imbaraga.Ihame shingiro nugukoresha urumuri rusohora kugirango ukubite ion ya argon (AR) hejuru yintego muri vacuum, kandi cations ziri muri plasma zizihuta kwihutira kugera kuri electrode mbi nkibikoresho bisatuye.Izi ngaruka zizatuma ibikoresho byintego biguruka hanyuma ubike kuri substrate kugirango ukore firime.

Muri rusange, hari ibintu byinshi biranga firime ukoresheje uburyo bwo gusohora:

(1) Ibyuma, ibivanze cyangwa insulator birashobora gukorwa mubintu bito bya firime.

(2) Mugihe gikwiye cyo gushiraho, firime ifite ibice bimwe irashobora gukorwa mubintu byinshi kandi bidahwitse.

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(5) Ni ingirakamaro mu gukora izindi filime.

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