Irashobora kugabanywamo DC magnetron gusohora hamwe na magnetron ya RF.
Uburyo bwa DC bwo gusohora busaba ko intego ishobora kwimura amafaranga meza yakuwe mubikorwa byo gutera ibisasu bya ion kuri cathode ihuye nayo nayo, hanyuma ubu buryo bushobora gusibanganya gusa amakuru yuyobora, bidakwiranye namakuru yimikorere, kuko kwishyuza ion hejuru ntishobora kubangikanywa mugihe cyo gutera ibisasu intego yo gukumira, bizatuma habaho kwiyongera kubishobora kugaragara, kandi hafi ya voltage ikoreshwa hafi ya yose ikoreshwa ku ntego, bityo amahirwe yo kwihuta kwa ion hamwe na ionisiyoneri hagati ya inkingi ebyiri zizagabanywa, cyangwa ntizishobora kuba ionisiyoneri, Bitera kunanirwa gusohora guhoraho, ndetse no gusohora guhagarika no guhagarara.Kubwibyo, radiyo yumurongo wa radiyo (RF) igomba gukoreshwa mugukingira intego cyangwa intego zitari ibyuma bifite ubushobozi buke.
Uburyo bwo gusohora burimo uburyo bwo gutatanya ibintu bigoye hamwe nuburyo butandukanye bwo guhererekanya ingufu: icya mbere, ibice byabaye byagonganye byimazeyo na atome yagenewe, kandi igice cyingufu za kinetic yingingo zibyabaye kizoherezwa kuri atome yagenewe.Ingufu za kinetic ya atome zimwe na zimwe zirenze inzitizi zishobora guterwa nizindi atome zibakikije (5-10ev kubutare), hanyuma zikavanwa mumatara ya lattice kugirango zitange atome zitari kurubuga, Kandi bikongera kugongana na atome zegeranye. , bikaviramo kugongana caskade.Iyo iyi mpanuka ya casade igeze hejuru yintego, niba ingufu za kinetic ya atome yegereye hejuru yintego iruta ingufu zihuza imbaraga (1-6ev kubutare), izo atome zizatandukana nubuso bwintego. hanyuma winjire mu cyuho.
Ipitingi ya sputtering nubuhanga bwo gukoresha ibice byashizwemo kugirango utere hejuru yintego mu cyuho kugirango ibisasu byatewe hejuru ya substrate.Mubisanzwe, umuvuduko muke wa inert gazi isohoka ikoreshwa mugutanga ibyabaye.Intego ya cathode ikozwe mubikoresho byo gutwikira, substrate ikoreshwa nka anode, 0.1-10pa argon cyangwa gaze ya inert yinjizwa mucyumba cya vacuum, kandi gusohora urumuri bibaho bitewe na cathode (intego) 1-3kv DC mbi cyane voltage cyangwa 13.56MHz ya voltage ya RF.Ionized argon ion itera ibisasu hejuru yintego, bigatuma atome yintego isenyuka kandi ikegeranya kuri substrate kugirango ikore firime yoroheje.Kugeza ubu, hari uburyo bwinshi bwo guswera, cyane cyane nko gusohora kwa kabiri, icyiciro cya gatatu cyangwa icya kane, gusunika magnetron, gusunika intego, guterana kwa RF, kubogama kubogamye, itumanaho ridafite asimmetrike RF gusohora, ion beam sputtering na reaction reaction.
Kuberako atome zimenetse zisakaye nyuma yo guhana ingufu za kinetic hamwe na ion nziza hamwe ningufu za electroni za volt icumi, atome zivanze zifite ingufu nyinshi, zifasha kuzamura ubushobozi bwo gukwirakwiza atome mugihe cyo guteranya, kunoza uburyo bwiza bwo gutondekanya, no gukora firime yateguwe ifite gukomera gukomeye hamwe na substrate.
Mugihe cyo gusohora, gaze imaze ioni, ion ya gaz iguruka kugana kuntego ihujwe na cathode ikorwa numurima wamashanyarazi, hanyuma electron ziguruka mukuzimu kurukuta rwubatswe hamwe na substrate.Muri ubu buryo, munsi yumuvuduko muke numuvuduko muke, umubare wa ion ni muto kandi imbaraga zo gusunika intego ni nke;Kuri voltage nini hamwe numuvuduko mwinshi, nubwo ion nyinshi zishobora kubaho, electron ziguruka kuri substrate zifite ingufu nyinshi, byoroshye gushyushya substrate ndetse no gusohora kwa kabiri, bigira ingaruka kumiterere ya firime.Byongeye kandi, amahirwe yo kugongana hagati ya atome yagenewe na molekile ya gaze mugihe cyo kuguruka kuri substrate nayo iriyongera cyane.Kubwibyo, izanyanyagizwa mu cyuho cyose, itazangiza gusa intego, ahubwo izanduza buri cyiciro mugihe cyo gutegura firime nyinshi.
Mu rwego rwo gukemura ibibazo byavuzwe haruguru, tekinoroji ya DC magnetron yatejwe imbere mu myaka ya za 70.Iratsinda neza ibitagenda neza bya cathode yo hasi no kwiyongera k'ubushyuhe bwa substrate buterwa na electron.Kubwibyo, yatejwe imbere byihuse kandi ikoreshwa cyane.
Ihame niryo rikurikira: mukuzunguruka kwa magnetron, kubera ko electron zigenda zikoreshwa ningufu za Lorentz mumashanyarazi, ingendo yazo izagenda itotezwa cyangwa ikazunguruka, kandi inzira yabo izaba ndende.Kubwibyo, umubare wo kugongana na molekile ya gaze ikora uriyongera, kuburyo ubucucike bwa plasma bwiyongera, hanyuma igipimo cya magnetron kigatera imbere cyane, kandi gishobora gukora munsi yumuvuduko ukabije wumuvuduko nigitutu kugirango bigabanye kwanduza film;Ku rundi ruhande, binatezimbere imbaraga zibyabaye kuri atome hejuru yubutaka, bityo ubwiza bwa firime burashobora kunozwa kuburyo bugaragara.Muri icyo gihe, iyo electron zitakaza ingufu binyuze mu kugongana kwinshi zigeze kuri anode, zahindutse electron zifite ingufu nkeya, hanyuma substrate ntizashyuha.Kubwibyo, magnetron sputtering ifite ibyiza by "umuvuduko mwinshi" n "ubushyuhe buke".Ikibi cyubu buryo nuko firime ya insulator idashobora gutegurwa, kandi umurima wa magnetiki utaringanijwe ukoreshwa muri electrode ya magnetron bizatera kwibeshya kugaragara kurugero, bikavamo igipimo gito cyo gukoresha intego, muri rusange ni 20% - 30 %.
Igihe cyoherejwe: Gicurasi-16-2022