Kubungabunga ubumenyi bwintego

Inshuti nyinshi zijyanye no kubungabunga intego hari ibibazo byinshi cyangwa bike, vuba aha hari nabakiriya benshi bagisha inama kubijyanye no kubungabunga ibibazo bijyanye nintego, reka reka umwanditsi mukuru wa RSM kugirango dusangire kubyerekeye ubumenyi bwo kubungabunga intego.

　　Nigute intego za sputter zigomba gukomeza?

　　1 maintenance Kubungabunga intego

Kugirango wirinde imizunguruko ngufi hamwe na arcing iterwa nu mwobo wanduye mugikorwa cyo gusohora, ni ngombwa kuvanaho rimwe na rimwe ibibyimba byegeranijwe hagati no kumpande zombi zumuhanda, nabyo bifasha abayikoresha guhora basakara cyane.

　　2 storage Kubika intego

Turasaba ko abakoresha babika intego (yaba ibyuma cyangwa ceramic) mubipfunyika vacuum, cyane cyane intego ibereye igomba kubikwa mu cyuho kugirango birinde okiside yurwego rukwiye kugira ingaruka ku bwiza bukwiye.Kubijyanye no gupakira intego yibyuma, turasaba ko bigomba gupakirwa mumifuka isukuye byibuze.

　　3 、 Intego yo gukora isuku

Intambwe yambere nugusukura hamwe nigitambara cyoroshye cyoroshye muri acetone;

Intambwe ya kabiri isa nintambwe yambere, gusukura n'inzoga;

Intambwe ya 3: sukura n'amazi ya deioni.Nyuma yo koza n'amazi ya deionion, intego ishyirwa mu ziko hanyuma ikuma kuri 100 ℃ muminota 30.Birasabwa gukoresha "lint yubusa" kugirango usukure oxyde na ceramic.

Intambwe ya kane nugukaraba intego hamwe na argon hamwe numuvuduko mwinshi nubushuhe buke kugirango ukureho ibice byose byanduye bishobora gutera arc muri sisitemu yo gusohoka.

　　4 circuit Inzira ngufi no kugenzura neza

Intego imaze gushyirwaho, cathode yose igomba kugenzurwa kugirango izunguruke kandi ikomere.Birasabwa gusuzuma niba muri cathode hari umuzunguruko mugufi ukoresheje metero yo guhangana na megger.Nyuma yo kwemeza ko nta muyoboro mugufi uri muri cathode, hashobora gukorwa igenzura ry’amazi, kandi amazi ashobora kwinjizwa muri cathode kugirango hamenyekane niba hari amazi yatemba.

　　5 Gupakira no gutwara

Intego zose zapakiwe mumifuka ya pulasitike ya vacuum ifunze hamwe nubushakashatsi butangiza amazi.Igipapuro cyo hanze ni agasanduku k'ibiti hamwe na anti-kugongana hirya no hino kugirango urinde intego n'indege byangirika mugihe cyo gutwara no kubika.