Imikorere ya Sputtering Intego muri Vacuum

Intego ifite ingaruka nyinshi, kandi umwanya witerambere ryisoko ni nini.Ni ingirakamaro cyane mubice byinshi.Ibikoresho hafi ya byose bishya bikoresha imashini zikoresha imbaraga za magneti zikomeye kugirango zihutishe ionisation ya argon hafi yintego, bikavamo kwiyongera mubishoboka byo kugongana hagati yintego na ion ya argon.Noneho reka turebe uruhare rwa sputtering target muri vacuum.

Kunoza igipimo cyo gusohoka.Mubisanzwe, gusohora DC bikoreshwa mugutwikira ibyuma, mugihe RF AC isohoka ikoreshwa mubikoresho bya magnetiki ceramic idakora neza.Ihame ryibanze nugukoresha urumuri rwinshi kugirango ukubite ion ya argon (AR) hejuru yintego muri vacuum, kandi cations ziri muri plasma zizihuta kwihuta kugera hejuru ya electrode mbi nkibikoresho bisatuye.Izi ngaruka zizatuma ibikoresho byintego biguruka hanyuma ubike kuri substrate kugirango ukore firime.

Muri rusange, hari ibintu byinshi biranga gutwikisha firime muburyo bwo gusohora: (1) ibyuma, ibivanze cyangwa insuliranteri birashobora gukorwa mumibare ya firime.

(2) Mugihe gikwiye cyo gushiraho, firime ifite ibice bimwe irashobora gukorwa mubintu byinshi kandi bidahwitse.

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(5) Ugereranije nibindi bikorwa, bifasha mu gukora firime nini nini nini.

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