Nkuko twese tubizi, guhumeka vacuum hamwe na ion sputtering bikoreshwa muburyo bwa vacuum.Ni irihe tandukaniro riri hagati yo gutwika umwuka hamwe no gusohora?Ibikurikira, abahanga mu bya tekinike bo muri RSM bazadusangiza.
Vacuum evaporation coating ni ugushyushya ibintu bigomba guhumeka mubushyuhe runaka hakoreshejwe ubushyuhe bwo kurwanya cyangwa urumuri rwa electron hamwe na bombe ya laser mu bidukikije bifite dogere ya vacuum itari munsi ya 10-2Pa, kugirango ingufu zinyeganyega zumuriro za molekile cyangwa atome mubikoresho birenze imbaraga zihuza ubuso, kuburyo umubare munini wa molekile cyangwa atome zishira cyangwa zigahinduka, hanyuma zigahita zigwa kuri substrate kugirango zikore firime.Ion sputtering coating ikoresha umuvuduko mwinshi wa ion nziza iterwa no gusohora gaze mugikorwa cyumuriro wamashanyarazi kugirango igabweho intego nka cathode, kugirango atome cyangwa molekile mumigambi ihunge hanyuma igwe hejuru yubuso bwakazi. firime isabwa.
Uburyo bukoreshwa cyane muburyo bwa vacuum evaporation coating ni ubushyuhe bwo kurwanya, bufite ibyiza byimiterere yoroshye, igiciro gito kandi gikora neza;Ikibi ni uko bidakwiriye ibyuma byangirika hamwe nubushyuhe bwo hejuru bwa dielectric.Gushyushya amashanyarazi ya elegitoronike no gushyushya laser birashobora kunesha ibitagenda neza byo gushyushya.Mu gushyushya urumuri rwa elegitoronike, urumuri rwa elegitoronike rwifashishwa mu gushyushya mu buryo butaziguye ibikoresho byatewe, kandi ingufu za kinetic y’urumuri rwa electron ziba ingufu z’ubushyuhe, bigatuma ibintu bishira.Gushyushya Laser ikoresha lazeri ifite ingufu nyinshi nkisoko yo gushyushya, ariko kubera igiciro kinini cya lazeri ifite ingufu nyinshi, irashobora gukoreshwa gusa muri laboratoire zubushakashatsi muri iki gihe.
Ikoranabuhanga rya sputtering ritandukanye na tekinoroji ya vacuum."Gusohora" bivuga ibintu byashizwemo ibice byibasiye hejuru (intego) kandi bigakora atome cyangwa molekile zikomeye zirasa hejuru.Ibyinshi mubice byasohotse biri muburyo bwa atome, bikunze kwitwa atome zanduye.Ibice bisakaye bikoreshwa mu gutera ibisasu birashobora kuba electron, ion cyangwa ibice bitagira aho bibogamiye.Kuberako ion yoroshye kwihuta munsi yumuriro wamashanyarazi kugirango ibone ingufu za kinetic zisabwa, inyinshi murizo zikoresha ion nkibice byatewe.Uburyo bwo gusohora bushingiye ku gusohora kwaka, ni ukuvuga, gusohora ion biva mu gusohora gaze.Tekinoroji zitandukanye zikoresha uburyo butandukanye bwo gusohora ibintu.DC diode isuka ikoresha DC glow isohoka;Triode isuka ni urumuri rushyigikiwe na cathode ishyushye;RF sputtering ikoresha urumuri rwa RF;Gukwirakwiza Magnetron ni urumuri rusohoka rugenzurwa na magnetique yumwaka.
Ugereranije na vacuum evaporation coating, sputtering coating ifite ibyiza byinshi.Kurugero, ikintu icyo aricyo cyose gishobora gusukwa, cyane cyane ibintu hamwe nibintu bifite aho bishonga cyane hamwe numuvuduko muke wumuyaga;Gufatanya hagati ya firime isukuye na substrate nibyiza;Ubucucike bwa firime nyinshi;Ubunini bwa firime burashobora kugenzurwa kandi gusubiramo nibyiza.Ikibi nuko ibikoresho bigoye kandi bisaba ibikoresho bya voltage nyinshi.
Mubyongeyeho, guhuza uburyo bwo guhumeka hamwe nuburyo bwo gusohora ni ion plate.Ibyiza byubu buryo nuko firime yabonetse ifite imbaraga zifatika hamwe na substrate, igipimo kinini cyo kubitsa hamwe nubucucike bwa firime nyinshi.
Igihe cyo kohereza: Nyakanga-20-2022