Itandukaniro hagati ya electroplating target na sputtering target

Hamwe niterambere ryimibereho yabantu hamwe niterambere ryiterambere rya siyanse nikoranabuhanga, abantu bafite ibyo basabwa byinshi kandi byisumbuyeho kugirango bakore ibicuruzwa bidashobora kwangirika, kwangirika kwangirika ndetse nubushyuhe bwo hejuru bukabije.Birumvikana ko igifuniko gishobora nanone gushushanya ibara ryibi bintu.Noneho, ni irihe tandukaniro riri hagati yo kuvura intego ya electroplating target na sputtering target?Reka abahanga bo mu ishami ry'ikoranabuhanga rya RSM bagusobanurire.

　　Intego y'amashanyarazi

Ihame rya electroplating rihuye niry'umuringa utunganya amashanyarazi.Iyo amashanyarazi, electrolyte irimo ioni yicyuma cya plaque isanzwe ikoreshwa mugutegura igisubizo;Kwinjiza ibicuruzwa byicyuma kugirango bishyirwe mubisubizo bya plaque hanyuma ubihuze na electrode mbi yumuriro wa DC nka cathode;Icyuma gitwikiriye gikoreshwa nka anode kandi gihujwe na electrode nziza yo gutanga amashanyarazi ya DC.Iyo amashanyarazi make ya DC akoreshejwe, icyuma cya anode gishonga mugisubizo kigahinduka cation ikimukira muri cathode.Izi ion zibona electron kuri cathode kandi zigabanywa ibyuma, bitwikiriye ibicuruzwa bigomba gushyirwaho.

　　Intego

Ihame nugukoresha cyane cyane gusohora urumuri kugirango bombe ya argon ion hejuru yintego, kandi atome yintego irasohorwa igashyirwa hejuru yubutaka kugirango ikore firime yoroheje.Imiterere nuburinganire bwa firime zasohotse nibyiza kuruta ibya firime zabitswe, ariko umuvuduko wo kubitinda uratinda cyane ugereranije na firime zabitswe.Ibikoresho bishya byifashisha hafi ya magneti akomeye kugirango azenguruke electroni kugirango yihutishe ionisation ya argon ikikije intego, ibyo bikaba byongera amahirwe yo kugongana hagati yintego na ion ya argon kandi bikazamura umuvuduko.Ibyinshi muri firime yerekana ibyuma ni DC isohoka, mugihe ibikoresho bya magnetiki ceramic idakora neza ni RF AC isohoka.Ihame ryibanze nugukoresha urumuri rwinshi muri vacuum kugirango utere hejuru yintego hamwe na argon ion.Cations ziri muri plasma zizihuta kwihutira hejuru ya electrode mbi nkibikoresho byavunitse.Iki gisasu kizatuma ibikoresho bigenewe biguruka kandi bishyire kuri substrate kugirango bikore firime yoroheje.

　　Ibipimo byo gutoranya ibikoresho

(1) Intego igomba kugira imbaraga zumukanishi hamwe nubushakashatsi bwimiti nyuma yo gukora firime;

(2) Ibikoresho bya firime ya firime itera ibintu bigomba kuba byoroshye gukora firime ivanze na gaze ya reaction;

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