1. Uburyo bwa Magnetron bwo gusohora:
Imashini ya Magnetron irashobora kugabanywa muri DC gusohora, guciriritse hagati ya radiyo na RF
A. DC itanga amashanyarazi ihendutse kandi ubucucike bwa firime yabitswe ni bubi.Mubisanzwe, bateri zo murugo zifotora hamwe na firime yoroheje ikoreshwa ningufu nkeya, kandi intego yo gusohora ni intego yicyuma.
B. Ingufu za RF zitanga ingufu ni nyinshi, kandi intego yo gusohora irashobora kuba intego idayobora cyangwa intego yo kuyobora.
C. Intego yo hagati yinteguza irashobora kuba intego ya ceramic cyangwa intego yicyuma.
2. Gutondekanya no gushyira mubikorwa intego
Hariho ubwoko bwinshi bwintego, kandi intego yo gutondekanya uburyo nayo iratandukanye.Ukurikije imiterere, bagabanijwemo intego ndende, intego ya kare hamwe nintego;Ukurikije ibihimbano, irashobora kugabanywa mubyuma byicyuma, intego ya alloy intego hamwe na ceramic compound target;Ukurikije imirima itandukanye ikoreshwa, irashobora kugabanywa mubice bya semiconductor bijyanye na ceramic, kwandika intego za ceramic, kwerekana intego za ceramic, nibindi. Intego za sputtering zikoreshwa cyane mubikorwa bya elegitoroniki namakuru, nkinganda zibika amakuru.Muri uru ruganda, intego za sputtering zikoreshwa mugutegura ibicuruzwa bya firime yoroheje (disiki ikomeye, umutwe wa magneti, disiki ya optique, nibindi).Kugeza ubu.Hamwe niterambere rihoraho ryinganda zamakuru, icyifuzo cyo kwandika intego ziciriritse ziciriritse ku isoko kiriyongera.Ubushakashatsi nogukora inyandiko zerekana intego ziciriritse byahindutse intumbero yo kwitabwaho cyane.
Igihe cyo kohereza: Gicurasi-11-2022