Mu myaka yashize, hamwe niterambere ryikoranabuhanga ryuzuzanya (IC), porogaramu zijyanye no kuzunguruka zateye imbere byihuse.Ultra isukuye cyane ya aluminium alloy sputtering intego, nkibikoresho bifasha mugukora ibyuma byuzuzanya byuzuzanya, byahindutse ingingo ishyushye mubushakashatsi bwakozwe murugo.umwanditsi wa RSM azatwereka ibiranga ubuziranenge bwa aluminium alloy sputtering intego.
Kugirango turusheho kunoza imikorere yimikorere ya magnetron igamije no kwemeza ubwiza bwa firime zabitswe, umubare munini wubushakashatsi werekana ko hari ibisabwa bimwe mubihimbano, microstructure hamwe nicyerekezo cyintambwe ya ultra-high purity aluminium alloy sputtering target.
Ingano yintete nicyerekezo cyintego bigira uruhare runini mugutegura nimiterere ya firime ya IC.Ibisubizo byerekana ko igipimo cyo kubitsa kigabanuka hamwe no kongera ingano yingano;Ku ntego yo gusunika hamwe nibintu bimwe, igipimo cyo gusunika intego hamwe nubunini buto bwihuta kuruta icy'intego gifite ingano nini;Nuburyo bunini ingano yintete yintego, niko bigenda bigabanura ubunini bwa firime zabitswe.
Munsi yigikoresho kimwe cyo gusohora hamwe nibipimo bitunganyirizwa, igipimo cyo gusohora intego ya Al Cu alloy intego yiyongera hamwe no kwiyongera k'ubucucike bwa atome, ariko muri rusange birahagaze murwego.Ingaruka yubunini bwibinyampeke ku gipimo cyimyororokere iterwa no guhindura ubwinshi bwa atome hamwe no guhindura ingano;Igipimo cyo kubitsa cyibasiwe cyane nicyerekezo cyintete ya Al Cu alloy intego.Hashingiwe ku kwemeza igipimo cy’indege (200) za kirisiti, kwiyongera kw'ijana rya (111), (220) na (311) indege za kirisiti bizongera igipimo cyo kubitsa.
Ingano yintete hamwe nicyerekezo cya ultra-high purity aluminium alloy intego zahinduwe cyane kandi zigenzurwa na ingot homogenisation, gukora bishyushye hamwe na rerystallisation annealing.Hamwe niterambere ryubunini bwa wafer kugera kuri 20.32cm (8in) na 30.48cm (12in), ingano yintego nayo iriyongera, ibyo bikaba bitanga ibisabwa hejuru kubintu bya ultra-high purity aluminium alloy sputtering intego.Kugirango hamenyekane ubuziranenge bwa firime n'umusaruro, ibipimo byo gutunganya intego bigomba kugenzurwa cyane kugirango intego ya microstructure igerweho kandi icyerekezo cy'ingano kigomba kugira imiterere ikomeye (200) na (220).
Igihe cyo kohereza: Jun-30-2022