Gukoresha ibikoresho bigenewe ibikoresho bya elegitoroniki, kwerekana no mubindi bice

Nkuko twese tubizi, iterambere ryiterambere ryibikoresho byikoranabuhanga bifitanye isano rya bugufi niterambere ryiterambere rya tekinoroji ya firime mu nganda zikoreshwa.Hamwe nogutezimbere tekinoloji yibicuruzwa bya firime cyangwa ibice mubikorwa byo gukoresha, tekinoroji igamije nayo igomba guhinduka.Kurugero, abakora Ic baherutse kwibanda ku iterambere ry’umuringa muke urwanya umuringa, biteganijwe ko uzasimbuza cyane firime ya aluminiyumu mu myaka mike iri imbere, bityo iterambere ry’intego z’umuringa hamwe n’intego zabo zisabwa bizaba byihutirwa.

Byongeye kandi, mu myaka yashize, icyerekezo cyerekana (FPD) cyasimbuye ahanini umuyoboro wa cathode-ray (CRT) ushingiye kuri mudasobwa hamwe nisoko rya tereviziyo.Bizongera kandi cyane tekiniki nisoko ku ntego za ITO.Noneho hariho tekinoroji yo kubika.Ibisabwa kuri disiki nyinshi, zifite imbaraga nini na disiki zishobora guhanagurwa bikomeje kwiyongera.Ibi byose byatumye habaho impinduka mubisabwa kubikoresho bigenewe inganda zikoreshwa.Mubikurikira, tuzamenyekanisha ibyingenzi bikoreshwa murwego rwintego hamwe niterambere ryiterambere ryintego muriki gice.

　　1. Microelectronics

Mu nganda zose zikoreshwa, inganda za semiconductor zifite ibisabwa byujuje ubuziranenge bisabwa kuri firime.Wafer ya silicon ya santimetero 12 (epistaxis 300) ubu yarakozwe.Ubugari bwimikoranire iragabanuka.Ibisabwa nabakora silicon wafer kubikoresho bigenewe ni nini nini, isuku nyinshi, amacakubiri make hamwe nintete nziza, bisaba ibikoresho bigenewe kugira microstructure nziza.Ibice bya kristaline ya diametre hamwe nuburinganire bwibikoresho byateganijwe byafashwe nkibintu byingenzi bigira ingaruka ku gipimo cyo kohereza firime.

Ugereranije na aluminiyumu, umuringa ufite imbaraga zo guhangana na electromobilisite no kutarwanya imbaraga, ibyo bikaba bishobora kuzuza ibisabwa na tekinoroji ya kiyobora mu nsinga ya subicron munsi ya 0.25um, ariko izana ibindi bibazo: imbaraga nke zifatika hagati yumuringa nibikoresho biciriritse.Byongeye kandi, biroroshye kubyitwaramo, biganisha ku kwangirika kwimiringa yumuringa no kumeneka kwizunguruka mugihe cyo gukoresha chip.Kugirango iki kibazo gikemuke, hagomba gushyirwaho inzitizi hagati yumuringa nu gipande cya dielectric.

Ibikoresho bigenewe gukoreshwa murwego rwa bariyeri yo guhuza umuringa harimo Ta, W, TaSi, WSi, nibindi. Ariko Ta na W ni ibyuma byanga.Biragoye gukora, kandi ibivangwa nka molybdenum na chromium birigwa nkibindi bikoresho.

　　2. Kwerekana

Flat panel yerekana (FPD) yagize ingaruka zikomeye kuri cathode-ray tube (CRT) ishingiye kuri mudasobwa ya mudasobwa hamwe nisoko rya tereviziyo mu myaka yashize, kandi bizanateza imbere ikoranabuhanga nibisabwa ku bikoresho bya ITO.Hano hari ubwoko bubiri bwintego za ITO uyumunsi.Imwe ni ugukoresha nanometero ya indium oxyde na tin oxyde ya tin nyuma yo gucumura, ikindi nukoresha indium tin alloy target.Filime ya ITO irashobora guhimbwa na DC ikora neza kuri indium-tin alloy target, ariko hejuru yintego izahinduka okiside kandi igire ingaruka kumuvuduko, kandi biragoye kubona intego nini nini.

Muri iki gihe, uburyo bwa mbere bwakoreshejwe muri rusange kugirango butange ibikoresho bya ITO, burimo gusohora ibintu na magnetron sputtering reaction.Ifite igipimo cyihuse cyo kubitsa.Ubunini bwa firime burashobora kugenzurwa neza, ubwikorezi buri hejuru, guhuza firime nibyiza, kandi gufatira hamwe kwa substrate birakomeye.Ariko ibikoresho bigenewe gukora biragoye kubikora, kuko indium oxyde na tin oxyde ntabwo byoroshye hamwe.Mubisanzwe, ZrO2, Bi2O3 na CeO batoranijwe nkinyongeramusaruro, kandi ibikoresho bigenewe bifite ubucucike bwa 93% ~ 98% byagaciro kerekana.Imikorere ya firime ITO yashizweho murubu buryo ifitanye umubano mwiza ninyongera.

Guhagarika kurwanya firime ya ITO yabonetse ukoresheje ibikoresho nkibyo bigera kuri 8.1 × 10n-cm, bikaba hafi yo kurwanya firime ITO isukuye.Ingano ya FPD nikirahure kiyobora ni nini cyane, kandi ubugari bwikirahure kiyobora bushobora no kugera kuri 3133mm.Kugirango tunoze imikoreshereze yibikoresho bigenewe, ibikoresho bya ITO bifite intego zitandukanye, nka silindrike, byatejwe imbere.Mu 2000, Komisiyo y’igihugu ishinzwe igenamigambi ry’iterambere na Minisiteri y’ubumenyi n’ikoranabuhanga bashyize intego nini za ITO mu Mabwiriza agenga ibice by’inganda z’amakuru muri iki gihe byashyizwe imbere mu iterambere.

　　3. Gukoresha ububiko

Kubijyanye na tekinoroji yo kubika, iterambere ryubucucike bukabije hamwe nubushobozi bukomeye bwa disiki bisaba umubare munini wibikoresho bya firime bidashaka.Filime ya CoF ~ Cu igizwe n'abantu benshi ni imiterere ikoreshwa cyane ya firime nini yo kwanga.Ibikoresho bya TbFeCo alloy ibikoresho bikenewe kuri disiki ya magnetique biracyari mu majyambere.Disiki ya magnetiki yakozwe na TbFeCo ifite ibiranga ubushobozi bunini bwo kubika, igihe kirekire cya serivisi hamwe no guhanagura bidasubirwaho.

Antimony germanium telluride ishingiye kubice byo guhindura ibyibutsa (PCM) yerekanaga imbaraga zubucuruzi, ihinduka igice cya NOR flash yibuka hamwe nisoko rya DRAM ubundi buryo bwo kubika ububiko, nyamara, mugushira mubikorwa byaragabanutse vuba imwe mubibazo biri kumuhanda ubaho ni ukubura gusubiramo umusaruro uriho urashobora kugabanuka ukundi gufunze burundu.Kugabanya ibyasubiwemo bigabanya ingufu zikoreshwa mububiko, byongerera igihe cya bateri, kandi bitezimbere umurongo wa data, ibintu byose byingenzi mumibare yamakuru yibanze, yibikoresho byabaguzi byoroshye.