Ibyiza nibibi bya tekinoroji yo gutwikira

Vuba aha, abakoresha benshi babajije ibyiza nibibi byogukoresha tekinoroji ya tekinoroji, Dukurikije ibisabwa nabakiriya bacu, ubu impuguke zo mu ishami ry’ikoranabuhanga rya RSM zizadusangiza, twizeye gukemura ibibazo.Hano haribintu bikurikira:

　　1 magn Magnetron idahwitse

Dufashe ko flux ya magnetiki inyura mumbere ninyuma ya magnetiki pole impera ya magnetron sputtering cathode ntago ihwanye, ni magnetron idahwitse ya cathode.Umwanya wa rukuruzi ya magnetron usanzwe usohora cathode wibanze hafi yubuso bwerekanwe, mugihe umurima wa magneti wa magnetron utaringaniye usohora cathode uva hanze.Umwanya wa rukuruzi ya cathode isanzwe ya magnetron igabanya cyane plasma hafi yubuso bwerekanwe, mugihe plasma yegereye substrate iba ifite intege nke cyane, kandi substrate ntizaterwa ibisasu na ion na electron zikomeye.Magnetron ya cathode idafite uburinganire irashobora kwagura plasma kure yubuso bwayo hanyuma igacengera substrate.

　　2 、 Umuyoboro wa radiyo (RF)

Ihame ryo kubitsa firime yerekana: ubushobozi bubi bukoreshwa kumuyobora ushyirwa inyuma yintego.Muri globe isohora plasma, mugihe icyapa cyiza cya ion cyihuta, gitera igitego cyikingira imbere yacyo kugirango gisohoke.Uku gusohora kurashobora kumara amasegonda 10-7.Nyuma yibyo, imbaraga nziza zashizweho nubushakashatsi bwiza bwakusanyirijwe ku ntego yo gukingira ikuraho ubushobozi bubi ku isahani y’umuyoboro, bityo igisasu cya ion zifite ingufu nyinshi ku ntego yo gukumira.Muri iki gihe, niba polarite yumuriro w'amashanyarazi ihinduwe, electron zizatera ibisasu byangiza kandi bitesha agaciro umuriro mwiza kuri plaque izirinda amasegonda 10-9, bigatuma zeru ishobora kuba zeru.Muri iki gihe, guhindura polarite yumuriro w'amashanyarazi birashobora kubyara amasegonda 10-7.

Ibyiza bya RF bisohora: intego zicyuma hamwe nintego za dielectric zirashobora gusohoka.

　　3 、 DC magnetron

Ibikoresho byo gutwikisha magnetron byongera imbaraga za magneti muri DC ya cathode ya DC, ikoresha imbaraga za Lorentz yumurima wa magneti kugirango ihuze kandi yongere inzira ya electron mumashanyarazi, byongera amahirwe yo kugongana hagati ya electron na atome ya gaze, byongera igipimo cya ionisation ya atome ya gaze, cyongera umubare ion zifite ingufu nyinshi zitera intego kandi zigabanya umubare wa electron zifite ingufu nyinshi zitera substrate.

Ibyiza bya planar magnetron isuka:

1. Intego yintego yintego irashobora kugera kuri 12w / cm2;

2. Intego ya voltage ishobora kugera kuri 600V;

3. Umuvuduko wa gaze urashobora kugera kuri 0.5pa.

Ibibi bya planar magnetron isuka: intego ikora umuyoboro uva mukarere ka kaburimbo, guhuza ibice byose byerekanwe ntibingana, kandi igipimo cyo gukoresha intego ni 20% - 30%.

　　4 frequency Hagati yumurongo wa AC magnetron gusohora

Bivuga ko mubikoresho biciriritse AC magnetron ibikoresho bisohora ibikoresho, mubisanzwe intego ebyiri zifite ubunini nubunini bingana kuruhande, bikunze kwitwa impanga.Bahagaritswe.Mubisanzwe, intego ebyiri zikoreshwa icyarimwe.Muburyo bwo hagati yumurongo wa AC magnetron yisubiraho, intego zombi zikora nka anode na cathode nazo, kandi zikora nka anode cathode hagati yikigice kimwe.Iyo intego igeze kuri kimwe cya kabiri cyikizunguruka, ubuso bwerekanwe buraterwa ibisasu hamwe na ion nziza;Muri kimwe cya kabiri cyiza, electroni ya plasma yihutishwa hejuru yintego kugirango itabangikanya amafaranga meza yegeranijwe hejuru yubuso bwubuso bwintego, ntabwo bihagarika gusa gutwika hejuru yintego, ahubwo binakuraho ibintu bya “ kubura anode ”.

Ibyiza byo hagati yintera inshuro ebyiri intego yibikorwa ni:

(1) Igipimo kinini cyo kubitsa.Ku ntego za silicon, igipimo cyo kohereza inshuro ziciriritse zikubye inshuro 10 ugereranije na DC reaction;

(2) Inzira yo gusohora irashobora guhagarara neza aho ikorera;

(3) Ikintu cyo "gutwika" kiravaho.Ubucucike bwubusembwa bwa firime yateguwe ni progaramu nyinshi zubunini ugereranije nubwa DC uburyo bwo gusohora ibintu;

(4) Ubushyuhe bwo hejuru bwa substrate ni ingirakamaro mu kuzamura ubwiza no gufatira hamwe kwa firime;

(5) Niba amashanyarazi yoroshye guhuza intego kuruta amashanyarazi ya RF.

　　5 magn Magnetron ikora

Muburyo bwo gusohora, gaze ya reaction iragaburirwa kugirango ikore hamwe nuduce duto duto kugirango ikore firime.Irashobora gutanga gaze reaction kugirango ikore hamwe nintego yo guteranya icyarimwe icyarimwe, kandi irashobora kandi gutanga gaze reaction kugirango ikore hamwe nicyuma gisohora icyuma cyangwa icyerekezo kimwe icyarimwe kugirango itegure firime zivanze zifite igipimo cy’imiti runaka.

Ibyiza bya magnetron reaction ya firime ikora:

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(2) Muguhindura ibipimo byimikorere, firime yimiti cyangwa idafite imiti irashobora gutegurwa, kugirango ibiranga firime bishobore guhinduka;

(3) Ubushyuhe bwa substrate ntabwo buri hejuru, kandi hariho imbogamizi nke kuri substrate;

(4) Irakwiriye kwambarwa ahantu hanini kandi igatanga umusaruro winganda.

Muburyo bwo gusunika magnetron yunvikana, ihungabana ryimyororokere iroroshye kugaragara, cyane cyane harimo:

(1) Biragoye gutegura intego zuzuzanya;

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(3) Igipimo gito cyo kubitsa;

(4) Ubucucike bwa firime buri hejuru.