Filime ntoya ikomeje gukurura abashakashatsi.Iyi ngingo irerekana ubushakashatsi bwimbitse nubushakashatsi bwimbitse kubikorwa byabo, uburyo bwo kubitsa buhindagurika, hamwe nibikoreshwa ejo hazaza.
"Firime" ni ijambo rigereranijwe kubintu bibiri-2D (2D) byoroheje cyane kurenza substrate yacyo, yaba igamije gupfuka substrate cyangwa gushyirwaho hagati yubuso bubiri.Mubikorwa byinganda byubu, ubunini bwama firime yoroheje mubusanzwe buva kuri sub-nanometero (nm) ibipimo bya atome (urugero, <1 nm) kugeza kuri micrometero nyinshi (μm).Graphene imwe-imwe ifite umubyimba wa atome ya karubone (ni ukuvuga ~ 0.335 nm).
Filime zakoreshwaga mu gushushanya no gushushanya mu bihe bya kera.Muri iki gihe, ibintu by'akataraboneka n'imitako bisizwe na firime yoroheje y'ibyuma by'agaciro nka bronze, ifeza, zahabu na platine.
Ikoreshwa rya firime cyane ni uburinzi bwumubiri bwibintu bitagaragara, ingaruka, gushushanya, isuri no gukuramo.Diyama imeze nka karubone (DLC) na MoSi2 ikoreshwa mukurinda moteri yimodoka kwambara no kwangirika kwubushyuhe bukabije buterwa no guterana amagambo hagati yimashini zigenda.
Filime ntoya ikoreshwa kandi mukurinda ibidukikije byangiza ibidukikije, byaba okiside cyangwa hydrasiyo kubera ubushuhe.Gukingira firime ziyobora byitabiriwe cyane mubijyanye nibikoresho bya semiconductor, gutandukanya firime ya dielectric, firime ya electrode yoroheje, hamwe no kuvanga amashanyarazi (EMI).By'umwihariko, ibyuma bya okiside yumuriro wa transistors (MOSFETs) birimo firime ya dielectric ya chimique na thermical stabilite nka SiO2, hamwe nicyuma cyuzuza ibyuma bya okiside (CMOS) birimo firime yumuringa ikora.
Electrode yoroheje yongerera igipimo cyingufu zingana nubunini bwa supercapacitori inshuro nyinshi.Byongeye kandi, ibyuma byoroheje byuma na MXenes (karbide yinzibacyuho, nitride cyangwa karubonitide) perovskite ceramic thin firime ikoreshwa cyane mukurinda ibikoresho bya elegitoronike kutabangamira amashanyarazi.
Muri PVD, ibikoresho bigenewe guhumeka no kwimurirwa mu cyumba cya vacuum kirimo substrate.Imyuka itangira kubitsa hejuru yubutaka bitewe gusa na kondegene.Icyuho kirinda kuvanga umwanda no kugongana hagati ya molekile zumuyaga na molekile ya gaze isigaye.
Imivurungano yinjiye mu cyuka, igipimo cy'ubushyuhe, umuvuduko w'amazi, hamwe n'ubushyuhe bwihishwa bw'ibikoresho bigenewe bigira uruhare runini mu kumenya uburinganire bwa firime n'igihe cyo gutunganya.Uburyo bwo guhumeka burimo gushyushya birwanya, gushyushya amashanyarazi ya elegitoronike, kandi vuba aha, epitaxy ya molekulari.
Ibibi bya PVD isanzwe ni ukudashobora guhumeka ibikoresho byo hejuru cyane byo gushonga hamwe nimpinduka zimiterere zatewe mubikoresho byabitswe kubera inzira yo guhumeka.Magnetron sputtering nuburyo bukurikiraho tekinike yo kubika umubiri ikemura ibyo bibazo.Mu gusunika kwa magnetron, molekile yintego irasohorwa (gusukwa) no guterwa ibisasu hamwe na ion nziza zifite ingufu binyuze mumashanyarazi akorwa na magnetron.
Filime ntoya ifite umwanya wihariye mubikoresho bya kijyambere bya elegitoroniki, optique, ubukanishi, fotonike, ubushyuhe na magnetiki ndetse no gushushanya ibintu bitewe nuburyo bwinshi, ubwuzuzanye hamwe nibikorwa.PVD na CVD nuburyo bukoreshwa cyane muburyo bwo kubika imyuka kugirango ikore firime zinini zingana mubyimbye kuva nanometero nkeya kugeza kuri micrometero nkeya.
Morfologiya yanyuma ya firime yabitswe igira ingaruka kumikorere no gukora neza.Nyamara, tekinike yoroheje ya firime isaba ubundi bushakashatsi kugirango hamenyekane neza imitungo ya firime yoroheje ishingiye kubikorwa byinjira, ibikoresho byatoranijwe, hamwe na substrate.
Isoko rya semiconductor kwisi yose ryinjiye mugihe gishimishije.Ibisabwa ku ikoranabuhanga rya chip byateye kandi bidindiza iterambere ry’inganda, kandi ibura rya chip riteganijwe gukomeza mu gihe runaka.Ibigezweho birashoboka guhindura ejo hazaza hinganda nkuko bikomeza
Itandukaniro nyamukuru hagati ya bateri ishingiye kuri graphene na bateri zikomeye-ni ibice bya electrode.Nubwo cathodes ikunze guhindurwa, allotropes ya karubone nayo irashobora gukoreshwa mugukora anode.
Mu myaka yashize, interineti yibintu yashyizwe mu bikorwa byihuse mu bice hafi ya byose, ariko ni ngombwa cyane cyane mu nganda z’amashanyarazi.
Igihe cyo kohereza: Apr-23-2023